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NGI Series

Active Vibration Isolation Modules

TCN Series

Active Vibration Isolation Modules

STC Series

Active Vibration Platform Sandwich style isolation platform Hybrid design incorporates stiff steel springs providing excellent performance at higher frequency disturbances Compact design with  integrated controller enables easy installation and tuning Ultra-fast settling time Stage and floor feed-forward options


Both high and low frequency vibration isolation in one economic package


Active Vibration Isolation Modules

SLT Series

Service Lifting Tools

SDS Series

Structural Dynamic System Platforms

Handling Systems

For Wafer & Mask Handling


The latest advance in EMI compensation

EMI Cancellation

Today’s cutting edge microscope technology needs IDE ultimate environment control